Piezoelectric micromachined ultrasonic transducers based on PZT thin films

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 12, 2005, Pages 2276-2288

  Muralt, P ^a   Ledermann, N ^a   Paborowski, J ^a   Barzegar, A ^a   Gentil, S ^a   Belgacem, B ^a   Petitgrand, S ^a   Bosseboeuf, A ^a   Setter, N ^a  

^a NONE

Author keywords

Circular plates; Clamped structure; Coupling coefficient; Coupling coefficients; Design parameters; Micromachined ultrasonic transducers; Piezoelectric ultrasonic transducers; PZT thin films; Small signal dielectric; Thin film properties

Indexed keywords

CIRCULAR PLATES; CLAMPED STRUCTURE; COUPLING COEFFICIENTS; DESIGN PARAMETERS; MICROMACHINED ULTRASONIC TRANSDUCERS; PIEZOELECTRIC ULTRASONIC TRANSDUCERS; PZT THIN FILMS; SMALL SIGNAL DIELECTRIC; THIN FILM PROPERTIES;

CLAMPING DEVICES; DAMPING; MICROMACHINING; PIEZOELECTRIC DEVICES; THIN FILMS;

ULTRASONIC TRANSDUCERS;

DIAGNOSTIC AGENT; LEAD; LEAD TITANATE ZIRCONATE; TITANIUM; ZIRCONIUM;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ECHOGRAPHY; ELECTRIC CAPACITANCE; ELECTROCHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; INSTRUMENTATION; METHODOLOGY; MICROELECTRODE; RADIATION EXPOSURE; STATISTICAL MODEL; TRANSDUCER;

COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; ELECTRIC CAPACITANCE; ELECTROCHEMISTRY; ELECTRONICS, MEDICAL; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LEAD; LINEAR MODELS; MEMBRANES, ARTIFICIAL; MICROELECTRODES; MINIATURIZATION; TITANIUM; TRANSDUCERS; ULTRASONOGRAPHY; ZIRCONIUM;

EID: 32844470099     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1563270     Document Type: Article

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