Effect of sputtering geometry on (112̄0) textured ZnO piezofilm

Acoustical Science and Technology

Volumn 27, Issue 1, 2006, Pages 53-55

  Miyamoto, Yoshinori ^a   Yanagitani, Takahiko ^a   Matsukawa, Mami ^a   Watanabe, Yoshiaki ^a  

^a DOSHISHA UNIVERSITY   (Japan)

Author keywords

Crystallite alignment; Piezoelectric film; Sputtering; Zinc oxide

Indexed keywords

CRYSTALLINE MATERIALS; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; SUBSTRATES; THIN FILMS;

CRYSTALLITE ALIGNMENT; FULL WIDTH HALF MAXIMUM (FWHM); PIEZOELECTRIC FILMS; SPUTTERING GEOMETRY;

ZINC OXIDE;

EID: 29744462389     PISSN: 13463969     EISSN: 13475177     Source Type: Journal    
DOI: 10.1250/ast.27.53     Document Type: Review

References (8)

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8. M. Kadota, PhD Thesis, Tohoku University (1994).