Air-gap type film bulk acoustic resonator using flexible thin substrate

Sensors and Actuators, A: Physical

Volumn 117, Issue 1, 2005, Pages 62-70

  Kang, Yu Ri ^a,b   Kang, Sung Chul ^a   Paek, Kyeong Kap ^c   Kim, Yong Kook ^a   Kim, Soo Won ^b   Ju, Byeong Kwon ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

^c Daejin University   (South Korea)

Author keywords

Flexible microsystems; Resonance characteristics; Thin FBAR; Ultra thin silicon wafer

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE PROPAGATION; ETCHING; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; SILICON WAFERS;

FLEXIBLE MICROSYSTEMS; FLEXIBLE THIN SUBSTRATES; RESONANCE CHARACTERISTICS;

RESONATORS;

EID: 9644264128     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.05.035     Document Type: Article

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