State-of-the-art surface acoustic wave linear motor and its future applications

Ultrasonics

Volumn 38, Issue 1, 2000, Pages 15-19

  Kurosawa, Minoru Kuribayashi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; LINEAR MOTORS; MICROACTUATORS; SILICON; TRIBOLOGY; ULTRASONIC TRANSDUCERS;

SURFACE ACOUSTIC WAVE LINEAR MOTOR;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0033879479     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0041-624X(99)00087-6     Document Type: Article

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