Ion beam, focused ion beam, and plasma discharge machining

CIRP Annals - Manufacturing Technology

Volumn 58, Issue 2, 2009, Pages 647-662

  Allen, D M ^a   Shore, P ^a   Evans, R W ^a   Fanara, C ^a,b   O'Brien, W ^a   Marson, S ^a   O'Neill, W ^c  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b EPPRA   (France)

^c University Engineering Department   (United Kingdom)

Author keywords

Focused Ion Beam Machining; Ion Beam Machining; Plasma discharge machining

Indexed keywords

ENGINEERING APPLICATIONS; FOCUSED ION BEAM MACHINING; HARDWARE AND SOFTWARE; ION BEAM MACHINING; MACHINING PROCESS; MATERIAL REMOVAL; NON-CONVENTIONAL METHODS; PLASMA DISCHARGE; PLASMA DISCHARGE MACHINING;

BEAM PLASMA INTERACTIONS; ELECTRIC DISCHARGES; FOCUSED ION BEAMS; INDUSTRIAL APPLICATIONS; ION BOMBARDMENT; IONS; PLASMAS;

MACHINING;

EID: 70449703262     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2009.09.007     Document Type: Article

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