Nano- and micro-scale patterning of Si (1 0 0) under keV ion irradiation

Applied Surface Science

Volumn 253, Issue 16, 2007, Pages 6824-6828

  Katharria, Yashpal S ^a   Kumar, Sandeep ^a   Tarun Sharma, A ^b   Kanjilal, Dinakar ^a  

^a INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^b UNIVERSITY OF DELHI   (India)

Author keywords

Atomic force microscopy; Nano dots; Ripples; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BEAMS; ION BOMBARDMENT; SPUTTERING; SURFACE REACTIONS;

NANODOTS; RIPPLE PATTERN; SELF ORGANIZATION; SURFACE RIPPLING;

SILICON;

EID: 34248374268     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.01.130     Document Type: Article

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