Large area smoothing of optical surfaces by low-energy ion beams

Thin Solid Films

Volumn 459, Issue 1-2, 2004, Pages 100-105

  Frost, F ^a   Fechner, R ^a   Ziberi, B ^a   Flamm, D ^a   Schindler, A ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Ion bombardment; Optical coating; Surface morphology; Surface roughness

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BOMBARDMENT; LITHOGRAPHY; OPTIMIZATION; QUARTZ; RELAXATION PROCESSES; SILICON; SURFACE PHENOMENA; SURFACE ROUGHNESS; SURFACES; ULTRAVIOLET RADIATION;

ION BEAM SPUTTERING; OPTICAL COATING; SURFACE RELAXATION; ULTRAVIOLET LITHOGRAPHY;

ION BEAMS;

EID: 2942525581     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.12.107     Document Type: Conference Paper

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