Fabrication of a micro-size diamond tool using a focused ion beam

Journal of Micromechanics and Microengineering

Volumn 18, Issue 7, 2008, Pages

  Ding, X ^a   Lim, G C ^a   Cheng, C K ^b   Butler, David Lee ^a,c   Shaw, K C ^a   Liu, K ^a   Fong, W S ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; CUTTING TOOLS; DIAMOND CUTTING TOOLS; DIAMONDS; ION BEAMS; ION BOMBARDMENT; IONS; OPTICAL DESIGN; PRECISION ENGINEERING; SPUTTER DEPOSITION; THREE DIMENSIONAL; WATER POLLUTION;

CUTTING EDGES; DIAMOND SUBSTRATES; DIAMOND TOOLS; FOCUSED ION BEAM (FEB); ION CURRENTS; MACHINING EXPERIMENTS; REMOVAL RATE (RR); SINGLE CRYSTALLINE DIAMONDS; THREE DIMENSIONAL (3D); TOP SURFACE; ULTRA PRECISION;

FOCUSED ION BEAMS;

EID: 47249105145     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/7/075017     Document Type: Article

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