Ultra-precision surface finishing by ion beam techniques;Ultragenaue Oberflächen-endbearbeitung Mittels Ionenstrahltechniken

Vakuum in Forschung und Praxis

Volumn 19, Issue 5, 2007, Pages 24-30

  Hansel T ^a   Frost, F ^a   Nickel, A ^d   Schindler, A ^b,c  

^a IOM

^b UNIVERSITY OF LEIPZIG   (Germany)

^c LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIVE SPECIES; HIGH-END OPTICAL SURFACES; SPATIAL SURFACE WAVELENGTH; SURFACE INTERACTION;

CURRENT DENSITY; ETCHING; FINISHING; ION BEAMS; PRECISION ENGINEERING;

SURFACE ROUGHNESS;

EID: 35348995090     PISSN: 0947076X     EISSN: None     Source Type: Journal    
DOI: 10.1002/vipr.200700330     Document Type: Article

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