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Applied Physics A: Materials Science and Processing

Volumn 78, Issue 5, 2004, Pages 651-654

Ion beam assisted smoothing of optical surfaces

(6) Frost, F a Fechner, R a Flamm, D a Ziberi, B a Frank, W a Schindler, A a

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC PROPERTIES; FUSED SILICA; ION BEAMS; NANOTECHNOLOGY; OPTICS; OPTIMIZATION; SURFACE ROUGHNESS;

ION BEAM ASSISTED SMOOTHING; NANOSCALE SURFACE SMOOTHING; OPTICAL SURFACES; STEP-EDGE EROSION;

SURFACES;

EID: 18844371960 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-003-2274-6 Document Type: Article

Times cited : (55)

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- note
- For further description and details of the planarization technique, the reader is referred to [2]

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