Focused ion beam applications to solid state devices

Nanotechnology

Volumn 7, Issue 3, 1996, Pages 247-258

  Matsui, Shinji ^a   Ochiai, Yukinori ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ETCHING; FAILURE ANALYSIS; ION BEAM LITHOGRAPHY; SEMICONDUCTOR DOPING; SOLID STATE DEVICES;

FOCUSED ION BEAM (FIB); QUANTUM EFFECT DEVICES;

ION BEAMS;

EID: 0030231388     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/7/3/013     Document Type: Review

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