Fractal topography of surfaces exposed to gas-cluster ion beams and modeling simulations

Journal of Applied Physics

Volumn 95, Issue 10, 2004, Pages 5408-5418

  Fenner, D B ^a,b  

^a Epion Corporation   (United States)

^b UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLICK DIFFUSION MODEL; GAS-CLUSTER ION BEAMS (GCIB); SPATIAL FREQUENCY; SPECTRAL DENSITY;

ANALYSIS; ATOMIC FORCE MICROSCOPY; BANDWIDTH; COMPUTER SIMULATION; DIFFUSION IN GASES; FRACTALS; GASES; ION BEAMS; IRRADIATION; MONTE CARLO METHODS; POISSON DISTRIBUTION; SPECTRUM ANALYZERS;

SURFACE ROUGHNESS;

EID: 2942558925     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1702142     Document Type: Article

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