Experimental study of three-dimensional microfabrication by focused ion beam technology

Review of Scientific Instruments

Volumn 71, Issue 2, 2000, Pages 1006-1008

  Yongqi, Fu ^a   Bryan, Ngoi Kok Ann ^a   Hung, N P ^a   Shing, Ong Nan ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5244312879     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150373     Document Type: Article

References (4)

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2. I. M. Templeton and H. G. Champion, J. Vac. Sci. Technol. B 13, 2603 (1995).
3. A. Kalburge, A. Konkar, T. R. Ramachandran, P. Chen, and A. Madhukar, J. Appl. Phys. 82, 859 (1997).
4. L. Bischoff, J. Teichert, and E. Hesse, Microelectron. Eng. 27, 351 (1995).