Machining with micro-size single crystalline diamond tools fabricated by a focused ion beam

Journal of Micromechanics and Microengineering

Volumn 19, Issue 2, 2009, Pages

  Ding, X ^a,b   Butler, D L ^a,b   Lim, G C ^a   Cheng, C K ^c   Shaw, K C ^a   Liu, K ^a   Fong, W S ^a   Zheng, H Y ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMONDS; FOCUSED ION BEAMS; METAL CUTTING; MICROMACHINING; POLYCRYSTALLINE MATERIALS; PRECISION ENGINEERING;

AMORPHOUS METALS; CUTTING EDGES; FIVE-AXIS; GRAIN SIZES; MECHANICAL MACHINING; MICRO-SCALE; PLATING MATERIALS; POLYCRYSTALLINE METALS; SINGLE-CRYSTALLINE DIAMONDS; ULTRA PRECISION;

AMORPHOUS MATERIALS;

EID: 61849130161     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/2/025005     Document Type: Article

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