High Aspect Ratio Nanometrology using Carbon Nanotube Probes in Atomic Force Microscopy

CIRP Annals - Manufacturing Technology

Volumn 56, Issue 1, 2007, Pages 533-536

  Fang, F Z ^a   Xu, Z W ^a   Dong, S ^b   Zhang, G X ^a  

^a TIANJIN UNIVERSITY   (China)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Atomic force microscopy; Carbon nanotube; Metrology

Indexed keywords

ALUMINUM COMPOUNDS; ASPECT RATIO; ATOMIC FORCE MICROSCOPY; BONDING; PROCESS CONTROL; PROTEINS; WELDING;

ALUMINUM OXIDE; BONDING STRENGTH; IMMUNOGLOBULIN G PROTEIN;

CARBON NANOTUBES;

EID: 34250190994     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2007.05.127     Document Type: Article

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