Microgrooving and microthreading tools for fabricating curvilinear features

Precision Engineering

Volumn 24, Issue 4, 2000, Pages 347-356

  Adams, D P ^a   Vasile, M J ^b   Krishnan, A S M ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAM LITHOGRAPHY; NUMERICAL CONTROL SYSTEMS; PROCESS CONTROL; SPUTTERING; STEEL; THREAD CUTTING; TUNGSTEN CARBIDE;

ION BEAM SPUTTERING; MICROGROOVING; MICROTHREADING; ULTRAPRECISION MACHINING;

MICROMACHINING;

EID: 0034291595     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(00)00045-3     Document Type: Article

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