Electronic states at dislocations and metal silicide precipitates in crystalline silicon and their role in solar cell materials

Applied Physics A: Materials Science and Processing

Volumn 96, Issue 1, 2009, Pages 235-253

  Seibt, Michael ^a   Khalil, Reda ^a,b   Kveder, Vitaly ^a,c   Schröter, Wolfgang ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b BENHA UNIVERSITY   (Egypt)

^c INSTITUTE OF SOLID STATE PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION OF; CRYSTALLINE SILICONS; DEEP LEVEL; DEEP LEVEL SPECTRUM; DEFECT-FREE; DISLOCATED SILICON; DISLOCATION TYPE; DRIVING FORCES; ELECTRON HOLE; ELECTRON SPIN RESONANCE; EQUILIBRIUM STRUCTURES; GETTERING PROCESS; LOW LEVEL; LUMINESCENCE EFFICIENCIES; METAL ATOMS; METAL IMPURITIES; METAL SILICIDE; METASTABLE DEFECT; MINORITY CARRIER; MULTI-ELECTRON; MULTI-METAL; NON EQUILIBRIUM; PAIR RECOMBINATION; PARTICLE COARSENING; RADIATIVE RECOMBINATION; RECOMBINATION CENTERS; ROOM TEMPERATURE; SHALLOW BANDS; SILICIDE PRECIPITATE; SOLAR CELL MATERIALS; STRAIN FIELDS; TERNARY PHASE DIAGRAMS; TRANSITION METAL IMPURITIES;

DEFECTS; ELECTRON SPIN RESONANCE SPECTROSCOPY; IMPURITIES; PARAMAGNETIC RESONANCE; PHASE DIAGRAMS; SILICIDES; SPIN DYNAMICS; TRANSITION METALS;

PRECIPITATION (CHEMICAL);

EID: 67349118136     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-008-5027-8     Document Type: Article

References (114)

1. R.M. Swanson 2006 Prog. Photovolt. Res. Appl. 14 443
2. V. Kveder M. Kittler W. Schröter 2001 Phys. Rev. B 63 115208
3. W. Schröter H. Cerva 2002 Solid State Phenomena 85-86 67
4. S.M. Myers M. Seibt W. Schröter 2000 J. Appl. Phys. 88 3795
5. M. Seibt V. Kveder W. Schröter O. Voß 2005 Phys. Status Solidi A 202 911
6. M. Kittler J. Lärz W. Seifert M. Seibt W. Schröter 1991 Appl. Phys. Lett. 58 911
7. M. Seibt W. Schröter 1989 Philos. Mag. 59 337
8. M. Seibt H. Hedemann A.A. Istratov F. Riedel A. Sattler W. Schröter 1999 Phys. Status Solidi A 171 301
9. W. Schröter, M. Seibt, D. Gilles, in Handbook of Semiconductor Technology, ed. by K.A. Jackson, W. Schröter, vol. 1 (Wiley, New York, 2000), p. 597
10. F. Riedel W. Schröter 2000 Phys. Rev. B 62 7150
11. P.S. Plekhanov T.Y. Tan 2000 Appl. Phys. Lett. 76 3777
12. P. Formanek M. Kittler 2005 J. Appl. Phys. 97 063707
13. T. Buonassisi A.A. Istratov M.D. Pickett M. Heuer J.P. Kalejs G. Hahn M.A. Marcus B. Lai Z. Cai S.M. Heald T.F. Ciszek R.F. Clark D.W. Cunningham A.M. Gabor R. Jonczyk S. Narayanan E. Sauar E.R. Weber 2006 Prog. Photovolt. 14 513
14. H. Alexander, H. Teichler, in Handbook of Semiconductor Technology, ed. by K.A. Jackson, W. Schröter, vol. 1 (Wiley, New York, 2000), p. 338
15. J. Rabier P. Cordier J.L. Dement H. Garem 2001 Mater. Sci. Eng. A 309-310 74
16. N. Lehto S. Marklund W. Yong-Liang 1994 Solid State Commun. 92 987
17. F.D. Wöhler H. Alexander W. Sander 1970 J. Phys. Chem. Solids 31 1381
18. V.A. Grazhulis Yu.A. Osipian 1970 Sov. Phys. JETP 31 677
19. V.V. Kveder Yu.A. Osipian M.N. Zolotukhin 1981 Sov. Phys. JETP 53 160
20. V. Kveder T. Sekiguchi K. Sumino 1995 Phys. Rev. B 51 23 16721
21. V.V. Kveder Yu.A. Ossipian I.R. Sagdeev A.I. Shalynin M.N. Zolotukhin 1985 Phys. Status Solidi A 87 657
22. M. Brohl, H. Alexander, in Structure and Properties of Dislocations in Semiconductors, ed. by S.G. Roberts, D.B. Holt, P.R. Wilshaw, IOP Conf. Proc. No. 104, Institute of Physics, London, 1989, p. 163
23. A. Castaldini D. Cavalcoli A. Cavallini S. Pizzini 2005 Phys. Rev. Lett. 95 076401
24. M. Kittler C. Ulhaq-Bouillet V. Higgs 1995 J. Appl. Phys. 78 4573
25. V. Higgs M. Kittler 1994 Appl. Phys. Lett. 65 2804
26. M. Kittler W. Seifert 1993 Scanning Microsc. 15 316
27. M. Kittler W. Seifert V. Higgs 1993 Phys. Status Solidi A 137 327
28. K. Knobloch M. Kittler W. Seifert J.J. Simon I. Perichaud 1998 Solid State Phenomena 63-64 105
29. S. Kusanagi T. Sekiguchi B. Shen K. Sumino 1995 Mater. Sci. Technol. 11 685
30. B. Shen T. Sekiguchi K. Sumino 1996 Jpn. J. Appl. Phys. 35 3301
31. N. Fujita R.J. Söberg P.R. Briddon A.T. Blumenau 2008 Solid State Phenomena 131-133 259
32. W. Schröter 1973 Phys Status Solidi A 19 159
33. A. Ourmazd 1981 Cryst. Res. Technol. 16 137
34. P.R. Wilshaw G.R. Booker 1985 Inst. Phys. Conf. Ser. 76 329
35. R. Labusch 1979 J. Phys. 40 681
36. R. Labusch 2002 J. Phys. Condens. Matter 14 12801
37. W. Schröter J. Kronewitz U. Gnauert F. Riedel M. Seibt 1995 Phys. Rev. B 52 13726
38. W. Schröter H. Hedemann V. Kveder F. Riedel 2002 J. Phys. Condens. Matter 14 13047
39. V.V. Kveder Yu.A. Osipian W. Schröter G. Zoth 1982 Phys. Status Solidi A 72 701713
40. P. Omling E.R. Weber L. Montelius H. Alexander J. Michel 1985 Phys. Rev. B 32 6571
41. V. Kveder V. Orlov M. Khorosheva M. Seibt 2008 Solid State Phenomena 131-133 175
42. J.R. Patel L.C. Kimerling 1979 J. Phys. 40 667
43. P. Omling E.R. Weber L. Montelius H. Alexander J. Michel 1985 Phys. Rev. B 32 6571
44. D. Cavalcoli A. Cavallini E. Gombia 1997 Phys. Rev. B 56 10208
45. V. Kveder W. Schröter M. Seibt A. Sattler 2002 Solid State Phenomena 82-84 361
46. D. Maroudas R.A. Brown 1991 J. Appl. Phys. 69 3865
47. O.V. Kononchuk V.V. Nikitenko V.I. Orlov E.B. Yakimow 1994 Phys. Status Solidi A 143 K5
48. O. Kononchuk V. Orlov O. Feklisova E. Yakimov 1996 Solid State Phenomena 51-52 15
49. R. Bullough R.C. Newman 1963 Prog. Semicond. 7 100
50. K. Knobloch M. Kittler W. Seifert 2003 J. Appl. Phys. 93 21069
51. O. Voß V.V. Kveder W. Schröter M. Seibt 2005 Phys. Status Solidi C 6 1847
52. O. Voß V. Kveder M. Seibt 2007 Phys. Status Solidi A 204 2185
53. A. Rodriguez H. Brachta I. Yonenaga 2004 J. Appl. Phys. 95 7841
54. M. Seibt A. Sattler C. Rudolf O. Voß V. Kveder W. Schröter 2006 Phys. Status Solidi A 203 696
55. V. Kveder M. Badylevich W. Schröter M. Seibt E. Steinman A. Izotov 2005 Phys. Status Solidi A 202 901
56. V. Kveder M. Badylevich E. Steinman A. Izotov M. Seibt W. Schröter 2004 Appl. Phys. Lett. 84 2106
57. M. Östling, C. Zaring, in Properties of Metal Silicides, ed. by K. Maex, M. van Rossum (emis data review series No.14, INSPEC, London 1995), p. 31
58. D.R. Hamann 1988 Phys. Rev. Lett. 60 313
59. V.J. Chabal D.R. Hamann J.E. Rowe M. Schlüter 1982 Phys. Rev. B 25 7598
60. J. Tersoff D.R. Hamann 1983 Phys. Rev. B 28 1168
61. K.A. Mäder H. von Känel 1993 Phys. Rev. B 48 4364
62. N.E. Christensen 1990 Phys. Rev. B 42 7148
63. N. Cherief C. D'Anterroches R.C. Cinti T.A. Nguyen Tan J. Derrien 1989 Appl. Phys. Lett. 55 1671
64. J.W. Christian, The Theory of Transformation in Metals and Alloys (Pergamon, Elmsford, 1975), p. 437
65. R. Wagner, R. Kampmann, in Handbook of Materials Science and Technology, vol. 5, ed. by R.W. Cahn, P. Haasen, E.J. Kramer (VCH, Weinheim, 1991), p. 212
66. W. Schröter, M. Seibt, in: Properties of Crystalline Silicon, ed. by R. Hull, The Institute of Electrical Engineering 1999, pp. 543 and 561
67. J. Utzig 1989 J. Appl. Phys. 65 3868
68. A.A. Istratov H. Hieslmair E.R. Weber 1999 Appl. Phys. A 69 13
69. M. Seibt, in Semiconductor Silicon 1990, ed. by H.R. Huff, Y. Takeshi, W. Bergholz (The Electrochemical Society, Pennington, 1990), p. 663
70. M. Seibt 1991 Solid State Phenomena 19-20 45
71. M. Seibt A. Griess A.A. Istratov H. Hedemann A. Sattler W. Schröter 1998 Phys. Status Solidi A 166 171
72. E. Nes J. Washburn 1971 J. Appl. Phys. 42 3562
73. O.F. Vyvenko 1998 Solid State Phenomena 63-64 301
74. A. Sattler H. Hedemann A.A. Istratov M. Seibt W. Schröter 1998 Solid State Phenomena 63-64 369
75. R. Khalil V. Kveder W. Schröter M. Seibt 2004 Solid State Phenomena 108-109 109
76. R. Khalil V. Kveder W. Schröter M. Seibt 2005 Phys. Status Solidi C 2 1802
77. M.G. Wardle J.P. Goss P.R. Briddon R. Jones 2005 Phys. Status Solidi A 202 883
78. W. Schröter H. Hedemann V. Kveder F. Riedel 2002 J. Phys. Condens. Matter 14 13047
79. H. Hedemann W. Schröter 1997 Solid State Phenomena 57-58 293
80. M.V. Trushin O.F. Vyvenko 2007 Phys. Status Solidi C 4 3056
81. A.A. Istratov H. Hedemann M. Seibt O.F. Vyvenko W. Schröter T. Heiser C. Flink H. Hieslmair E.R. Weber 1998 J. Electrochem. Soc. 145 3889
82. C. Flink H. Feick S.A. [tmp] McHugo W. Seifert H. Hieslmair T. Heiser A.A. Istratov E.R. Weber 2000 Phys. Rev. Lett. 85 4900
83. J.J. van Kooten E.G. Sieverts C.A.J. Ammerlaan 1987 Solid State Commun. 64 1489
84. S.H. Muller G.M. Tuymann E.G. Sieverts C.A.J. Ammerlaan 1982 Phys. Rev. B 25 25
85. H. von Känel K.A. Mäder E. Müller M. Onda H. Sirringhaus 1992 Phys. Rev. B 45 13807
86. N. Onda J. Henz E. Müller K.A. Mäder H. von Känel 1992 Appl. Surf. Sci. 56-58 421
87. M.G. Grimaldi P. Baeri C. Spinella S. Lagomarsino 1992 Appl. Phys. Lett. 60 1132
88. R.L. Maltez M. Behar X.W. Lin 1995 Nucl. Instrum. Methods Phys. Rev. B 106 400
89. Y. Gao S.P. Wong W.Y. Cheung G. Shao K.P. Homewood 2003 Appl. Phys. Lett. 83 638
90. M. Seibt K. Graff 1989 J. Appl. Phys. 63 4444
91. A.G. Cullis L.E. Katz 1974 Philos. Mag. 30 1419
92. K. Honda A. Ohsawa N. Toyokura 1984 Appl. Phys. Lett. 45 270
93. J. Wong-Leung D.J. Eaglesham J. Sapjeta D.C. Jacobson J.M. Poate J.S. Williams 1998 J. Appl. Phys. 83 580
94. M. Seibt, unpublished results
95. J.M. Silcock W.J. Tunstall 1964 Philos. Mag. 10 361
96. E. Nes 1974 Acta. Metall. 22 81
97. J.K. Solberg 1978 Acta Crystallogr. A 34 684
98. A. Broniatowski 1989 Phys. Rev. Lett. 63 3074
99. M. Kittler C. Ulhaq-Bouillet V. Higgs 1995 J. Appl. Phys. 78 4573
100. M. Kittler W. Seifert 1995 Mat. Sci. Forum 196-201 1123
101. M. Seibt 1992 Mat. Res. Soc. Symp. Proc. 262 957
102. W.C. Dash 1956 J. Appl. Phys. 27 1193
103. H. Ewe, D. Gilles, S.K. Hahn, M. Seibt, W. Schröter, in Semiconductor Silicon, ed. by H.R. Huff, W. Bergholz, K. Sumino (The Electrochemical Society, Pennington, 1994), p. 796
104. H. Ewe, Ph.D. Thesis, Göttingen, 1996
105. M. Seibt V. Kveder 2004 Solid State Phenomena 95-96 447
106. A.A. Istratov T. Buonassisi R.J. [tmp] McDonald A.R. Smith R. Schindler J.A. Rand J.P. Kalejs E.R. Weber 2003 J. Appl. Phys. 94 6552
107. M. Setton, in Properties of Metal Silicides, ed. by K. Maex, M. van Rossum (emis data review, series No. 14, INSPEC, London, 1995), p. 129
108. E.M. Sokolovskaya O.I. Chernikova E.I. Gladyshevsky O.I. Bodak 1973 Russ. Metall. 6 114 Translated from Izv. Nauk SSSR Met.
109. T. Buonassisi M. Heuer A.A. Istratov M.D. Pickett M.A. Marcus B. Lai Z. Cai S.M. Heald E.R. Weber 2007 Acta Mater. 55 6119
110. M. Heuer T. Buonassisi M.A. Marcus A.A. Istratov M.D. Pickett T. Shibata E.R. Weber 2006 Phys. Rev. B 73 235204
111. M. Heuer T. Buonassisi A.A. Istratov M.D. Pickett M.A. Marcus A.M. Minor E.R. Weber 2007 J. Appl. Phys. 101 123510
112. H. Nordmark, M. Di Sabatino, E.J. Vrelid, J.C. Walmsley, R. Holmestad, Proceedings of 22nd EUPVSEC, 3-7 Sept. 2007 Milan, Italy, p. 1710
113. C. Rudolf, P. Saring, L. Stolze, M. Seibt, Mater. Sci. Eng. B, in press
114. P. Saring, C. Rudolf, L. Stolze, M. Seibt, Mater. Sci. Eng. B, in press