|
Volumn 62, Issue 11, 2000, Pages 7150-7156
|
Electrical and structural properties of nanoscale NiSi2 precipitates in silicon
a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
NICKEL COMPLEX;
SILICON DERIVATIVE;
ARTICLE;
ELECTRICAL PARAMETERS;
NANOPARTICLE;
PHYSICS;
SEMICONDUCTOR;
SPECTROSCOPY;
STRUCTURE ANALYSIS;
|
EID: 0034664545
PISSN: 01631829
EISSN: None
Source Type: Journal
DOI: 10.1103/PhysRevB.62.7150 Document Type: Article |
Times cited : (63)
|
References (34)
|