The precipitation of Fe at the Si-SiO2 interface

Journal of Applied Physics

Volumn 83, Issue 1, 1998, Pages 580-584

  Wong Leung, J ^a   Eaglesham, D J ^b   Sapjeta, J ^b   Jacobson, D C ^b   Poate, J M ^b   Williams, J S ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000076223     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366643     Document Type: Article

References (19)

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