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Volumn 57-58, Issue , 1997, Pages 293-298
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Influence of electric field-enhanced emission on deep level transient spectra of bandlike extended defects: NiSi2-precipitates in silicon
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Author keywords
Bandlike states; DLTS; Extended defects; Poole frenkel effect; Precipitates
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Indexed keywords
DEEP LEVEL TRANSIENT SPECTROSCOPY;
DEFECTS;
ELECTRIC FIELDS;
NICKEL COMPOUNDS;
PRECIPITATES;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON;
SILICON COMPOUNDS;
BAND STRUCTURE;
COMPUTER SIMULATION;
ELECTRIC FIELD EFFECTS;
ELECTRON EMISSION;
ELECTRONIC DENSITY OF STATES;
SEMICONDUCTING SILICON;
BANDLIKE STATES;
DEFORMATION POTENTIAL;
ELECTRIC FIELD DEPENDENCE;
EXTENDED DEFECT;
NISI2;
POOLE-FRENKEL EFFECT;
RECOMBINATION CENTRES;
TRANSIENT SPECTRA;
POWER QUALITY;
CRYSTAL DEFECTS;
POOLE FRENKEL EFFECT;
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EID: 16944364480
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: None Document Type: Article |
Times cited : (12)
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References (14)
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