Influence of the dislocation travel distance on the DLTS spectra of dislocations in Cz-Si

Solid State Phenomena

Volumn 131-133, Issue , 2008, Pages 175-182

  Kveder, V ^a   Orlov, V ^a   Khorosheva, M ^a   Seibt, M ^b  

^a INSTITUTE OF SOLID STATE PHYSICS   (Russian Federation)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Deep level defects; Dislocations; DLTS; Silicon

Indexed keywords

CONCENTRATION (PROCESS); DEFORMATION; DISLOCATIONS (CRYSTALS); ELECTRON TUNNELING; IMPURITIES; CRYSTAL IMPURITIES; DEFECTS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON;

ATOMIC IMPURITIES; DEEP DEFECTS; DEEP LEVEL DEFECTS; DISLOCATION VELOCITY; DEEP-LEVEL DEFECTS; DISLOCATION VELOCITIES; DLTS SPECTRA; SI CRYSTALS; SLOW MOTION; TRAVEL DISTANCE;

SEMICONDUCTING SILICON; DEEP LEVEL TRANSIENT SPECTROSCOPY;

EID: 38549178360     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (18)

1. V. Kveder, M. Badylevich, W.Schröter, M. Seibt, E. Steinman, A. Izotov: Phys. Stat. Sol. (a), 202 (2005), p. 901
2. A. Castaldini, D. Cavalcoli, A. Cavallini, S. Pizzini: Phys. Rev. Lett. 95 (2005), p. 076401
3. M. Kittler, C. Ulhaq-Bouillet, V. Higgs: J. Appl. Phys. 78 (1995), p. 4573
4. V. Higgs, M. Kittler: Appl. Phys. Lett. 65 (1994), p. 2804
5. S. Kusanagi, T. Sekiguchi, B. Shen, K. Sumino: Mater. Sci. Technology, 11 (1995), p. 685
6. M. Kittler, W. Seifert: Mater. Sci. Eng., B24 (1994), 78
7. V. Kveder, M. Kittler, W. Schröter, Phys. Rev. B, 63 (2001), p. 115208
8. J. R. Patel and L. C. Kimerling: J. Physique, 40 (1979), p. C6-67
9. V. Kveder, Yu. A. Ossipyan, W. Schröter, G. Zoth: Phys Stat. Sol. (a), 72 (1982), p. 701
10. P. Omling, E. R. Weber, L. Montelius, H. Alexander, J. Michel: Phys. Rev. B 32, (1985), p.6571
11. D. Cavalcoli, A. Cavallini, E. Gombia: Phys. Rev. B, 56 (1997), p. 10208
12. W. Schröter and H. Cerva: Solid State Phenomena, Vols. 85-86, (2002), p. 67-144
13. O.V. Kononchuk, V.I. Nikitenko, V.I. Orlov and E.B. Yakimov: Phys. Stat. Sol. (a), 143 (1994) p. K5
14. O.V.Feklisova, E.B.Yakimov, N.Yarykin: Physica B 340, (2003), p. 1005
15. O. V. Feklisova, B. Pichaud, E. B. Yakimov: Phys. Stat. Sol. (a), 202, (2005), p. 896
16. W. Schröter, J.Kronewitz, U.Gnauert, F.Riedel, M.Seibt: Phys. Rev. B, 52 (1995), p. 13726
17. W. Schröter, V.Kveder, H.Hedemann: Solid State Phenom. 82-84, (2002), p. 213
18. M. Seibt, V. Kveder, W. Schröter, O. Voß: Phys. Stat. Sol. (a) 202, (2005), p. 911