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Volumn 63-64, Issue , 1998, Pages 301-310
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Minority carrier transient spectroscopy of copper-silicide and nickel-disilicide precipitates in silicon
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Author keywords
DLTS; Extended defects; MCTS; Quasi Fermi Level
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Indexed keywords
CAPACITANCE;
CHARGE CARRIERS;
COPPER COMPOUNDS;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
FERMI LEVEL;
NICKEL COMPOUNDS;
COPPER SILICIDE;
MINORITY CARRIER TRANSIENT SPECTROSCOPY (MCTS);
NICKEL DISILICIDE;
SEMICONDUCTING SILICON;
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EID: 4243942106
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: 10.4028/www.scientific.net/ssp.63-64.301 Document Type: Article |
Times cited : (7)
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References (13)
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