Early stages of iron precipitation in silicon

Physica Status Solidi C: Conferences

Volumn 2, Issue 6, 2005, Pages 1802-1806

  Khalil, R ^a   Kveder, V ^a,b   Schroter W ^a   Seibt, M ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b INSTITUTE OF SOLID STATE PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

IRON; PRECIPITATION (CHEMICAL);

DEEP LEVEL TRANSIENT SPECTROSCOPY (DLTS); INTERSTITIAL IRON ATOMS; IRON CONCENTRATIONS; P-TYPE FLOAT-ZONE SILICON;

SILICON;

EID: 27344451542     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200460507     Document Type: Conference Paper

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