메뉴 건너뛰기




Volumn 88, Issue 7, 2000, Pages 3795-3819

Mechanisms of transition-metal gettering in silicon

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001609123     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1289273     Document Type: Article
Times cited : (289)

References (152)
  • 3
    • 0346318632 scopus 로고
    • edited by B. O. Kolbesen, C. Claeys, P. Stallhofer, and F. Tardif Electrochemical Society, Pennington, NJ
    • Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing, edited by B. O. Kolbesen, C. Claeys, P. Stallhofer, and F. Tardif (Electrochemical Society, Pennington, NJ, 1493). Vol. 93-15.
    • (1493) Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing , vol.93 , Issue.15
  • 4
    • 0348209204 scopus 로고    scopus 로고
    • edited by B. O. Kolbesen, P. Stallhofer, C. Claeys, and F. Tardif Electrochemical Society, Pennington, NJ
    • Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing II, edited by B. O. Kolbesen, P. Stallhofer, C. Claeys, and F. Tardif (Electrochemical Society, Pennington, NJ, 1997), Vol. 97-22.
    • (1997) Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing II , vol.97 , Issue.22
  • 24
    • 0347579390 scopus 로고    scopus 로고
    • edited by H. R. Huff, U. Gösele, and H. Tsuya Electrochemical Society, Pennington, NJ
    • S. M. Myers et al., in Semiconductor Silicon 1998, edited by H. R. Huff, U. Gösele, and H. Tsuya (Electrochemical Society, Pennington, NJ, 1998), Vol. 98-1, pp. 1150-1161.
    • (1998) In Semiconductor Silicon 1998 , vol.98 , Issue.1 , pp. 1150-1161
    • Myers, S.M.1
  • 33
    • 0024666556 scopus 로고
    • J. O. Borland, Semicond. Int. 12, 144 (1989), 12, 154 (1989).
    • (1989) Semicond. Int. , vol.12 , pp. 154
  • 62
    • 0025640421 scopus 로고
    • edited by H. R. Huff, K. G. Barraclough, and J. Chikawa Electrochemical Society, Pennington, NJ
    • M. Seibt, in Semiconductor Silicon 1990, edited by H. R. Huff, K. G. Barraclough, and J. Chikawa (Electrochemical Society, Pennington, NJ, 1990), Vol. 90-7, pp. 663-674.
    • (1990) Semiconductor Silicon 1990 , vol.90 , Issue.7 , pp. 663-674
    • Seibt, M.1
  • 69
    • 0000127464 scopus 로고
    • M. Seibt and K. Graff, J. Appl. Phys. 63, 4444 (1988); Mater. Res. Soc. Symp. Proc. 104, 215 (1988).
    • (1988) J. Appl. Phys. , vol.63 , pp. 4444
    • Seibt, M.1    Graff, K.2
  • 70
    • 0000127464 scopus 로고
    • M. Seibt and K. Graff, J. Appl. Phys. 63, 4444 (1988); Mater. Res. Soc. Symp. Proc. 104, 215 (1988).
    • (1988) Mater. Res. Soc. Symp. Proc. , vol.104 , pp. 215
  • 100
    • 0003689862 scopus 로고
    • edited by T. B. Massalski, J. L. Murray, L. H. Bennett, and H. Baker ASM, Metals Park, OH
    • Binary Alloy Phase Diagrams, edited by T. B. Massalski, J. L. Murray, L. H. Bennett, and H. Baker (ASM, Metals Park, OH, 1986).
    • (1986) Binary Alloy Phase Diagrams
  • 141
    • 25544472109 scopus 로고
    • thesis, Göttingen University
    • R. Kühnapfel, W. Schröter, and D. Gilles, Mater. Sci. Forum 10-12, 151 (1986); R. Kühnapfel, thesis, Göttingen University, 1987.
    • (1987)
    • Kühnapfel, R.1
  • 151
    • 0018002845 scopus 로고
    • and citations therein
    • G. Martin, Philos. Mag. A 38, 131 (1978), and citations therein.
    • (1978) Philos. Mag. A , vol.38 , pp. 131
    • Martin, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.