Impact of high B concentrations and high dislocation densities on Au diffusion in Si

Journal of Applied Physics

Volumn 95, Issue 12, 2004, Pages 7841-7849

  Rodriguez, A ^a   Bracht, H ^a   Yonenaga, I ^b  

^a UNIVERSITY OF MÜNSTER   (Germany)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; CONTAMINATION; DIFFUSION; DISLOCATIONS (CRYSTALS); ENTHALPY; EXTRAPOLATION; FERMI LEVEL; GOLD; NEUTRON ACTIVATION ANALYSIS; POINT DEFECTS; PRECIPITATION (CHEMICAL); SAMPLING; SEGREGATION (METALLOGRAPHY); SEMICONDUCTOR DOPING; SUBSTITUTION REACTIONS; TRANSMISSION ELECTRON MICROSCOPY;

COULOMB INTERACTION; DISLOCATION DENSITIES; ENERGY DIFFERENCE; KICK-OUT MECHANISMS;

SILICON;

EID: 3142599548     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1751235     Document Type: Article

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