Physics and phenomena in pulsed magnetrons: An overview

Journal of Physics D: Applied Physics

Volumn 42, Issue 9, 2009, Pages

  Bradley, J W ^a   Welzel, T ^b  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DECAY RATES; FAST ELECTRON GENERATIONS; IN-DEPTH INVESTIGATIONS; ION ENERGIES; LOW-PRESSURE PLASMAS; MAGNETRON SYSTEMS; MID FREQUENCIES; NOBLE GAS; OPERATING PARAMETERS; PARTICLE DENSITIES; PHYSICAL PROCESS; PHYSICAL-CHEMICAL PROCESS; PHYSICS-BASED; PLASMA PARAMETERS; PLASMA POTENTIALS; THIN FILM QUALITIES; TRANSIENT PHENOMENON;

ARGON; MAGNETRONS; PLASMA DEVICES; PLASMAS;

ELECTRIC DISCHARGES;

EID: 65449180011     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/9/093001     Document Type: Article

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