Characterization of pulsed plasma in unbalanced magnetron argon discharge

Physics of Plasmas

Volumn 12, Issue 6, 2005, Pages 1-8

  Lee, Sang Won ^a,b   Seo, Sang Hun ^a   In, Jung Hwan ^a   Chung, Chin Wook ^c   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b PLASMART Company   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC DISCHARGES; ELECTRON TRAPS; PLASMA HEATING;

CATHODE SHEATH; ELECTRON HEATING; ELECTRON TEMPERATURE; PULSE FREQUENCY;

PLASMAS;

EID: 24344479208     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1924709     Document Type: Article

References (13)

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