Spatial and temporal development of the plasma potential in differently configured pulsed magnetron discharges

New Journal of Physics

Volumn 10, Issue , 2008, Pages

  Welzel, Th ^a   Dunger, Th ^a   Liebig, B ^a   Richter, F ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DRAG; MAGNETRONS; PLASMAS; PROBES; SUBSTRATES;

EMISSIVE PROBES; GEOMETRICAL SHIELDING; HEATING CURRENTS; PLASMA POTENTIALS; POSITIVE VALUES; POTENTIAL RANGES; PULSED MAGNETRON DISCHARGES; QUASINEUTRALITY; SPATIO TEMPORALS; SUBSTRATE HOLDERS; SUBSTRATE POTENTIALS; TARGET POTENTIALS; TEMPORAL DEVELOPMENT; TIME RESOLUTIONS; TIME-RESOLVED;

ELECTRIC DISCHARGES;

EID: 59249090402     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/10/12/123008     Document Type: Article

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