Ion energy distributions in magnetron sputtering of zinc aluminium oxide

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Welzel, Thomas ^a   Kleinhempel, Ronny ^a,b   Dunger, Thoralf ^a   Richter, Frank ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b Southwall Europe GmbH   (Germany)

Author keywords

Ion energy distribution function; Magnetron; Mass spectrometry; Plasma potential; Pulsed discharges; Sputtering

Indexed keywords

ION ENERGY DISTRIBUTION FUNCTION; ION ENERGY DISTRIBUTION FUNCTIONS; PLASMA POTENTIAL; PULSED DISCHARGE; PULSED DISCHARGES;

DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRIC POWER DISTRIBUTION; ION BEAMS; MASS SPECTROMETRY; NEGATIVE IONS; PLASMA SOURCES; ZINC; ZINC OXIDE;

TARGETS;

EID: 65449136277     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200930805     Document Type: Conference Paper

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