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Volumn 72, Issue 1, 2003, Pages 59-69
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Investigation of a pulsed magnetron sputtering discharge with a vacuum pentode modulator power supply
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Author keywords
Duty cycle; Pulse rate; Pulsed magnetron discharge
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Indexed keywords
DIFFUSION;
ELECTRIC CURRENTS;
ELECTRIC DISCHARGES;
ELECTRONS;
IONIC CONDUCTION;
PLASMAS;
SPUTTER DEPOSITION;
CURRENT PULSES;
MAGNETRON SPUTTERING;
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EID: 0041659216
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0042-207X(03)00100-3 Document Type: Article |
Times cited : (4)
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References (26)
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