Spatially-resolved optical emission from a bi-polar pulsed DC magnetron discharge

Surface and Coatings Technology

Volumn 203, Issue 3-4, 2008, Pages 391-395

  Swindells, I ^a   Kelly, P J ^b   Bradley, J W ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

Author keywords

Electron energy distribution function; Electron temperature; Optical emission spectroscopy; Pulsed DC magnetron; Sputtering; Time resolved

Indexed keywords

DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRIC GROUNDING; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ELECTRON TEMPERATURE; ELECTRONS; LIGHT; LIGHT EMISSION; MAGNETRON SPUTTERING; MAGNETRONS; SPUTTERING;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; GROUNDED SUBSTRATES; PULSED DC MAGNETRON; PULSED DC MAGNETRON DISCHARGE; PULSED MAGNETRON DISCHARGES; SPATIALLY RESOLVED; SPATIALLY RESOLVED OPTICAL EMISSION; TIME-RESOLVED;

OPTICAL EMISSION SPECTROSCOPY;

EID: 55049115777     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.09.024     Document Type: Article

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