Time-resolved triple probe investigations of a pulsed magnetron discharge

Journal of Applied Physics

Volumn 102, Issue 4, 2007, Pages

  Bryant, P M ^a   Voronin, S A ^a   Bradley, J W ^a   Vetushka, A ^b  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ARGON; ELECTRON TEMPERATURE; LIFE CYCLE; MAGNETRONS; PROBES;

ENERGETIC ELECTRONS; PLASMA PARAMETERS; TEMPORAL EVOLUTION; TRIPLE PROBE;

TEMPERATURE MEASUREMENT;

EID: 34548398073     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2769805     Document Type: Article

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