Global models of pulse-power-modulated high-density, low-pressure discharges

Plasma Sources Science and Technology

Volumn 5, Issue 2, 1996, Pages 145-158

  Lieberman, M A ^a   Ashida, S ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHLORINE; MATHEMATICAL MODELS; PLASMA DENSITY;

ENERGY BALANCE; PARTICLE BALANCE; PLASMA DISCHARGES;

PLASMA SOURCES;

EID: 0030134012     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/2/006     Document Type: Article

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