Fabrication of 10 nm enclosed nanofluidic channels

Applied Physics Letters

Volumn 81, Issue 1, 2002, Pages 174-176

  Cao, Han ^a   Yu, Zhaoning ^a   Wang, Jian ^b   Tegenfeldt, Jonas O ^c   Austin, Robert H ^c   Chen, Erli ^d   Wu, Wei ^a   Chou, Stephen Y ^a  

^a Princeton University   (United States)

^b Nanonex Corporation   (United States)

^c PRINCETON UNIVERSITY   (United States)

^d NanoOpto Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MOLECULE; CROSS SECTION; FABRICATION TOOL; NANOFLUIDIC CHANNEL; NANOMETER SCALE STRUCTURE; TOTAL ANALYSIS SYSTEM; ULTRA-SMALL; UNIFORM ARRAY;

PHYSICAL PROPERTIES; PHYSICS;

NANOFLUIDICS;

EID: 79958221815     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1489102     Document Type: Article

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