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Volumn 46, Issue 7, 2002, Pages 951-958
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Current status and future directions of SOI technology
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Author keywords
[No Author keywords available]
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
DYNAMIC RANDOM ACCESS STORAGE;
ELECTRIC INSULATORS;
MOSFET DEVICES;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE STRUCTURES;
SUBSTRATES;
VLSI CIRCUITS;
SYSTEM ON CHIP (SOC) TECHNOLOGY;
SILICON ON INSULATOR TECHNOLOGY;
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EID: 0036642925
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1101(02)00030-8 Document Type: Conference Paper |
Times cited : (11)
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References (66)
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