Folded-channel MOSFET for deep-sub-tenth micron era

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 1032-1034

  Hisamoto, Digh ^a   Lee, Wen Chin ^a   Kedzierski, Jakub ^a   Anderson, Erik ^a   Takeuchi, Hideki ^a   Asano, Kazuya ^a   King, Tsu Jae ^a   Bokor, Jeffrey ^a   Hu, Chenming ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SHORT-CHANNEL EFFECTS;

DIELECTRIC MATERIALS; ELECTRIC RESISTANCE; GATES (TRANSISTOR); SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES;

MOSFET DEVICES;

EID: 0032255808     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)