Experimental studies of multimode helicon plasma waves

Plasma Sources Science and Technology

Volumn 4, Issue 3, 1995, Pages 337-344

  Chen, R T S ^a   Breun, R A ^a   Gross, S ^a   Hershkowitz, N ^a   Hsieh, M K J ^a   Jacobs, J ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AZIMUTHAL MODE NUMBER; LANGMUIR PROBES; MULTIMODE HELICON PLASMA WAVES; PLASMA COLUMN; WAVELENGTH MEASUREMENT;

ANTENNAS; CALCULATIONS; ELECTROMAGNETIC WAVE PROPAGATION IN PLASMA; ELECTRON DENSITY MEASUREMENT; HELICONS; MAGNETIC FIELDS; MATHEMATICAL MODELS; PLASMA DENSITY; PROBES;

PLASMA WAVES;

EID: 0029352490     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/4/3/003     Document Type: Article

References (19)

1. The application of the helicon source to plasma processing
2. Experiments on helicon plasma sources
3. Experimental modeling of inductive discharges