Frequency dependence of helicon wave plasmas near lower hybrid resonance frequency

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 673-677

  Yun, Seok Min ^a   Kim, Jung Hyung ^a   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001766251     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580704     Document Type: Article

References (28)

1. R. W. Boswell, Plasma Phys. Control. Fusion 26, 1147 (1984).
2. G. Giroult-Matlakowski, C. Charles, A. Durandot, R. W. Boswell, S. Armand, H. M. Persing, A. J. Perry, P. D. Lloyd, S. R. Hyde, and D. Bogsanyi, J. Vac. Sci. Technol. A 12, 2754 (1994).
3. P. D. Loewenhardt, B. D. Blackwell, R. W. Boswell, G. D. Conway, and S. M. Hamberger, Phys, Rev. Lett. 67, 2792 (1991).
4. F. F. Chen, Laser Part. Beams 7, 551 (1989).
5. P. Zhu and R. W. Boswell, Phys. Rev. Lett. 63, 2805 (1989).
6. F. F. Chen, Plasma Phys. Control. Fusion 33, 339 (1991).
7. N. Jiwari, T. Fukasawa, H. Kawakami, H. Shindo, and Y. Horiike, J. Vac. Sci. Technol. A 12, 1322 (1994).
8. A. Komori, T. Shoji, K. Miyamoto, J. Kawai, and Y. Kawai, Phys. Fluids B 3, 893 (1991).
9. F. F. Chen, J. Vac. Sci. Technol. A 10, 1389 (1992).
10. R. W. Boswell, A. J. Perry, and M. Emami, J. Vac. Sci. Technol A 7, 3345 (1989).
11. P. Zhu and R. W. Boswell, J. Appl. Phys. 68, 1981 (1990).
12. P. Zhu and R. W. Boswell, Phys. Fluids B 3, 869 (1991).
13. J. H. Kim and H. Y. Chang, Phys. Plasmas 3, 1462 (1996).
14. S M. Yun, J. H. Kim, S. S. Hun, and H. Y. Chang, Plasma Sources Sci. Technol. (submitted).
15. A J. Perry, D. Vender, and R. W. Boswell, J. Vac. Sci. Technol. B 9, 310 (1991).
16. J. H. Kim, S. M. Yun, and H. Y. Chang, IEEE Trans. Plasma Sci. (to be published).
17. M. Krämer, Plasma Phys. 24, 8013 (1982).
18. Paul Bonoli, IEEE Trans. Plasma Sci. PS-12, 95 (1984).
19. T. H. Stix, Waves in Plasmas (AIP, New York, 1992), p. 29.
20. P. M. Bellan and Porkolab, Phys. Fluids 19, 995 (1976).
21. S. C. Brow. Basic Data of Plasma Physics (MIT Press, Cambridge, MA, 1966). p. 143.
22. P. L. Auer, H. Hurwitz, and R. Miller, Phys. Fluids 1, 501 (1958).
23. T. H. Stix, Phys. Fluids 3, 19 (1960).
24. T. H. Stix, Phys. Rev. Lett. 15, 878 (1965).
25. S. Takamura, H. Matsushita, U. Suzuki, S. Ohshima, Y. Uesugi. and T. Okuda, Nucl. Fusion 20, 429 (1980).
26. Y. Uesugi, S. Takamure, and T. Okuda, Plasma Phys. 24, 369 (1982).
27. N. A. Krall and A. W. Trivelpiece, Principles of Plasma Physics (McGraw-Hill, New York, 1973), p. 198.
28. A. W. Degeling, C. O. Jung, R. W. Boswell, and A. R. Ellingboe, Phys. Plasmas 3, 2788 (1996).