Modeling of profile effects for inductive helicon plasma sources

IEEE Transactions on Plasma Science

Volumn 24, Issue 1, 1996, Pages 152-160

  Mouzouris, Yiannis ^a,b   Scharer, John E ^a,b  

^a IEEE   (United States)

^b University of Wisconsin ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CODES (SYMBOLS); COMPUTER SIMULATION; CYCLOTRONS; HELICONS; IONIZATION; MODELS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; PLASMA HEATING; PLASMA INTERACTIONS; PLASMA WAVES; THERMAL EFFECTS;

COLLISIONAL MODEL; INDUCTIVE HELICON PLASMA SOURCES; NEUTRAL GAS; RADIOFREQUENCY WAVE ABSORPTION PROFILES; TEMPERATURE PROFILES;

PLASMA SOURCES;

EID: 0030086082     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.491753     Document Type: Article

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