Low-field helicon discharges

Plasma Physics and Controlled Fusion

Volumn 39, Issue 5A, 1997, Pages

  Chen, F F ^a,b   Jiang, X ^a   Evans, J D ^a   Tynan, G ^b   Arnush, D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b PMT Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRON TRANSITIONS; ELECTRONIC DENSITY OF STATES; MAGNETIC FIELD EFFECTS; PARTICLE BEAM INJECTION; PLASMA ETCHING;

DEPOSITION REACTORS; FINITE ELECTRON MASS; LOW FIELD HELICON DISCHARGES; TRIVELPIECE-GOULD MODES;

HELICONS;

EID: 0031142981     PISSN: 07413335     EISSN: None     Source Type: Journal    
DOI: 10.1088/0741-3335/39/5A/038     Document Type: Article

References (6)

1. Chen F F and Decker C D 1992 Plasma Phys. Control. Fusion 34 635
2. Chen F F and Chevalier G 1992 J. Vac. Sci. Technol. A 10 1389
3. Aossey D and Chen F F unpublished
4. Chen F F 1996 Phys. Plasmas 3 1783
5. Chen F F and Arnush D 1996 UCLA PPG-1562, to be submitted
6. Sudit I D and Chen F F 1994 Plasma Sources Sci. Technol. 3 162