Diagnosis for advanced plasma control of materials processing

Plasma Physics and Controlled Fusion

Volumn 39, Issue 5A, 1997, Pages

  Sugai, H ^a   Ahn, T H ^a   Ghanashev, I ^a   Goto, M ^a   Nagatsu, M ^a   Nakamura, K ^a   Suzuki, K ^a   Toyoda, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRON CYCLOTRON RESONANCE; ELECTRON TRANSPORT PROPERTIES; ELECTRONIC DENSITY OF STATES; HELICONS; PLASMA OSCILLATIONS; THIN FILMS;

ADVANCED PLASMA CONTROL; ANTENNA PLASMA COUPLINGS; PLANAR MICROWAVE DISCHARGE;

PLASMA DIAGNOSTICS;

EID: 0031140096     PISSN: 07413335     EISSN: None     Source Type: Journal    
DOI: 10.1088/0741-3335/39/5A/042     Document Type: Article

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