Hot-electron production and wave structure in a helicon plasma source

Physical Review Letters

Volumn 79, Issue 2, 1997, Pages 233-236

  Molvik, A W ^a   Ellingboe, A R ^a   Rognlien, T D ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; CALCULATIONS; ELECTRON ENERGY ANALYZERS; ELECTRONS; HELICONS; IONIZATION; MAGNETIC FIELD EFFECTS; PLASMA DENSITY; PLASMA HEATING; PLASMA OSCILLATIONS; PLASMA SHEATHS;

ELECTRON CURRENT DENSITY; ELECTRON ENERGY DISTRIBUTION; ELECTRON HEATING; HOT ELECTRON; ION SATURATION PROBE MEASUREMENT; PHASE VELOCITY; PLASMA PROCESSING;

PLASMA SOURCES;

EID: 6244285178     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.79.233     Document Type: Article

References (22)

1. A. R. Ellingboe, R. W. Boswell, J. P. Booth, and N. Sadeghi, Phys. Plasmas 2, 1807 (1995).
2. A. W. Molvik, J. Vac. Sci. Technol. A 14, 984 (1996).
3. N. Hershkowitz, in Plasma Diagnostics, O. Auciello and D. L. Flamm (Academic Press, San Diego, CA, 1989), Vol. 1, p. 162.
4. I. D. Sudit and F. F. Chen, Plasma Sources Sci. Technol. 3, 162 (1994).
5. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 4, 332 (1995).
6. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, J. Appl. Phys. 73, 3657 (1993).
7. A. W. Molvik, Rev. Sci. Instrum. 52, 704 (1981).
8. R. W. Boswell, Phys. Lett. 33A, 457 (1970).
9. R. W. Boswell, Plasma Phys. Controlled Fusion 26, 1147 (1984).
10. A. W. Degeling, C. O. Jung, R. W. Boswell, and A. R. Ellingboe, Phys. Plasmas 3, 2788 (1996).
11. P. K. Loewenhardt, Phys. Rev. Lett. 67, 2792 (1991).
12. A. Komori, Phys. Fluids B 3, 893 (1991).
13. F. F. Chen, J. Vac. Sci. Technol. A 10, 1389 (1992).
14. V. P. Katyukha, Rev. Sci. Instrum. 65, 1368 (1994).
15. P. K. Loewenhardt, B. D. Blackwell, and S. M. Hamberger, Phys. Plasmas 1, 875 (1994).
16. R. T. S. Chen, Plasma Sources Sci. Technol. 4, 337 (1995).
17. K. Nakamura, K. Suzuki, and H. Sugai, Jpn. J. Appl. Phys. 34, 2152 (1995).
18. H. Takeno, Nucl. Fusion 35, 75 (1995).
19. F. F. Chen, in High Density Plasma Sources, Oleg A. Popov (Noyes Publications, Park Ridge, NJ, 1995), Chap. 1.
20. A. R. Ellingboe and R. W. Boswell, Phys. Plasmas 3, 2797 (1996).
21. J. C. Sprott, Rev. Sci. Instrum. 37, 897 (1966).
22. J. Gilland, R. Breun, and N. Hershkowitz, Bull. Am. Phys. Soc. 40, 1580 (1995).