Resonance wave discharge and collisional energy absorption in helicon plasma source

Plasma Physics and Controlled Fusion

Volumn 36, Issue 11, 1994, Pages 1719-1735

  Shamrai, K P ^a   Taranov, V B ^a  

^a INSTITUTE FOR NUCLEAR RESEARCH   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON COLLISION FREQUENCY; HELICON DISPERSION BRANCHES; PLASMA RESONATOR; RESONANCE WAVE DISCHARGE;

ANTENNAS; ELECTRIC DISCHARGES; ELECTRIC IMPEDANCE; ELECTRONS; OSCILLATIONS; PLASMA DEVICES; PLASMAS; RESONATORS;

PLASMA SOURCES;

EID: 0028549759     PISSN: 07413335     EISSN: None     Source Type: Journal    
DOI: 10.1088/0741-3335/36/11/002     Document Type: Article

References (24)

1. Experiments on helicon plasma sources
2. The application of the helicon source to plasma processing