Ion energy distribution functions in a multipole confined argon plasma diffusing from a 13.56-MHz helicon source

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 1, 1993, Pages 157-163

  Charles, C ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND DENSITY; CONFINED DIFFUSION; DIFFUSION CHAMBER; DIFFUSION REGION; ION ENERGY DISTRIBUTION FUNCTIONS; PRESSURE CONDITIONS; RADIAL PROFILES; RESONANT CHARGE EXCHANGE;

HELICONS; PLASMA DENSITY;

DIFFUSION;

EID: 84881175633     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578283     Document Type: Article

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