Helicon ion source for plasma processing

Review of Scientific Instruments

Volumn 65, Issue 4, 1994, Pages 1368-1370

  Katyukha, V P ^a   Kirichenko, G S ^a   Rusavskii, A V ^a   Taranov, V B ^a   Shamrai, K P ^a  

^a INSTITUTE FOR NUCLEAR RESEARCH   (Ukraine)

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EID: 0009393629     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1144963     Document Type: Article

References (3)