Large volume, high density rf inductively coupled plasma

Applied Physics Letters

Volumn 50, Issue 17, 1987, Pages 1130-1132

  Boswell, R W ^a   Porteous, R K ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744347315     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.98257     Document Type: Article

References (6)