Control of hydrocarbon radicals and film deposition by using a whistler wave discharge in range of radio frequency

Applied Physics Letters

Volumn 59, Issue 21, 1991, Pages 2675-2677

  Mieno, T ^a   Shoji, T ^b   Kadota, K ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006102757     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.105903     Document Type: Article

References (9)