The effects of magnetic fields on a planar inductively coupled argon plasma

Plasma Sources Science and Technology

Volumn 5, Issue 3, 1996, Pages 383-388

  Lee, Ho Jun ^a   Yang, Il Dong ^a   Whang, Ki Woong ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; ARGON; CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRIC EXCITATION; IMPEDANCE MATCHING (ELECTRIC); MAGNETIC FIELD EFFECTS; MAGNETIC FIELD MEASUREMENT; PLASMA DENSITY; WAVE PLASMA INTERACTIONS;

ARGON PLASMA; ELECTRON TEMPERATURE;

PLASMAS;

EID: 0030205216     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/3/005     Document Type: Article

References (20)

1. Hopwood J 1992 Plasma Sources Sci. Technol. 1 109
2. Hopwood J, Guamieri C R, Whitehair S J and Cuomo J J 1993 J. Vac. Sci. Technol. A 11 152
3. Barnes M S, Foster J C and Keller J H 1993 Appl. Phys. Lett. 62 2622
4. Ventzek L G, Hoekstra R J and Kushner M J 1994 J. Vac. Sci. Technol. B 12 461
5. Steward R A, Vitello P and Graves D B 1994 J. Vac. Sci. Technol. B 12 478
6. Godyak V A, Piejak R B and Alexandrovich BM 1994 Plasma Sources Sci. Technol. 3 169
7. Turner M M 1993 Phys. Rev. Lett. 1884
8. Bosewell R W 1984 Plasma Phys. Controlled Fusion 26 1147
9. Komori A, Shoji T, Miyamoto K, Kawai J and Kawai Y 1991 Phys. Fluids B 3 893
10. Chen F F 1991 J. Vac. Sci. Technol. A 10 1389
11. Jiwari N, Fukasawa T, Kawakami H, Shindo H and Horrike Y 1994 J. Vac. Sci. Technol. A 12 1332
12. Chen F F and Decker CD 1992 Plasma Phys. Controlled Fusion 34 635
13. Huchinson I H Principles of Plasma Diagnostics (London: Cambridge University Press) p 10
14. Pranjipe A P, McVittie J P and Self S A 1990 J. Appl. Phys. 67 6718
15. Auciello O and Flamm D L 1989 Plasma Diagnostics vol 1 (San Diego: Academic) p 122
16. Godyak V A, Piejak R B and Alexandrovich B M 1992 Plasma Sources Sci. Technol. 1 36
17. Chen F F 1984 Introduction to Plasma Physics and Controlled Fusion (New York: Plenum) p 79
18. Chen F F 1991 Plasma Phys. Controlled Fusion 33 339
19. Cherrington B E 1979 Gaseous Electronics and Gas Lasers (Oxford: Pergamon) p 11
20. Hopwood J 1994 Plasma Sources Sci. Technol. 3 460