Characterization of an azimuthally symmetric helicon wave high density plasma source

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 2885-2892

  Tynan, G R ^a   Bailey III, A D ^a   Campbell, G A ^a   Charatan, R ^a   De Chambrier, A ^a,b   Gibson, G ^a   Hemker, D J ^a   Jones, K ^a   Kuthi, A ^a   Lee, C ^a   Shoji, T ^a,c   Wilcoxson, M ^a  

^a Trikon Technologies Inc   (United States)

^b Watkins Johnson Company   (United States)

^c NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001048197     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580844     Document Type: Article

References (13)

1. G. Campbell, R. W. Conn, and T. Shoji, US Patent No. 4,990,229 (5 Feb. 1991).
2. G. Campbell, R. W. Conn, and T. Shoji, US Patent No. 5,091,049 (25 Feb. 1992).
3. G. Campbell, R. W. Conn, D. C. Pearson, A. P. de Chambrier, and T. Shoji, US Patent No. 5,122,251 (16 June 1992).
4. G. A. Campbell, R. W. Conn, D. Katz, N. W. Parker, and D. C. Pearson, US Patent No. 5,421,891 (6 June 1995).
5. T. Shoji, Y. Y. Sakawa, S. Nakazawa K. Kadota, and T. Sato, Plasma Sources Sci. Technol. 2, 5 (1993).
6. F. F. Chen, Laser Part. Beams 7, 551 (1989).
7. I. D. Sudit and F. F. Chen, Plasma Sources Sci. Technol. 3, 162 (1994).
8. F. F. Chen, I. Sudit, and M. Light, Plasma Sources Sci. Technol. 5, 173 (1996).
9. K. P. Shamrai and V. B. Taranov, Plasma Phys. Control. Fusion 36, 1719 (1994).
10. F. F. Chen and D. Arnush (submitted).
11. A. B. Ellingboe and R. W. Boswell, Phys. Plasmas 3, 2797 (1996).
12. G. G. Borg and I. V. Kamenski, Phys. Plasmas 4, 529 (1997).
13. J. Coburn and M. Chen, J. Appl. Phys. 51, 3134 (1980).