An experimental study of breakdown in a pulsed Helicon plasma

Plasma Sources Science and Technology

Volumn 4, Issue 4, 1995, Pages 534-540

  Boswell, R W ^a   Vender, D ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000211728     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/4/4/004     Document Type: Article

References (17)

1. The application of the helicon source to plasma processing
2. Starting Potentials of High-Frequency Gas Discharges at Low Pressure